This paper proposes a fast and accurate learning-based thick-mask model dubbed multi-channel block attention network (MCBA-Net) to solve this problem for EUV lithography. The proposed MCBA-Net ...
Chinese AI start-up DeepSeek has shaken up the AI market with its DeepSeek-R1 language model. ChatGPT maker OpenAI CEO Sam Altman has welcomed the competition from Chinese-based low-cost ...